采用琼斯矩阵进行系统偏振分析，提出了一种基于全内反射的偏振相位差快速测量方法。采用光学薄膜特征矩阵理论对薄膜进行光学特性分析，导出了通过测量全内反射偏振相位差以获取体材料折射率以及膜层厚度的关系式。实验采用该方法获得了K9玻璃的色散曲线，分析了其膜层厚度的监控灵敏度，并与透射率监控方式进行比较。研究结果表明：采用该方法获得的K9玻璃色散曲线与标准曲线非常吻合；该方法相较于透射率监控具有更高的厚度监控灵敏度和折射率测量精度。

After the analysis of system polarization by means of Jones matrix, a rapid measurement of polarization phase difference based on total internal reflection is proposed. The theory of optical film characteristic matrix is applied to analyze optical properties of film, and expressions are derived to determine refractive index of bulk material and thickness of layer by measuring polarization phase difference. The dispersion curve of K9 glass is acquired using the proposed method. The monitoring sensitivity of film deposition thickness is analyzed and compared with that of transmissivity monitoring method. The results show that the obtained dispersion curve of K9 glass is very consistent with the standard one. Mean while, the proposed method has higher thickness monitoring sensitivity and measurement precision refractive index than that of transmissivity monitoring method.