针对水升华器工作监测要求，基于Fabry-Perot干涉微腔研制了一种光纤声振动传感器。将耐低温聚合物薄膜材料以周边拉伸固定的方式制作成超薄膜片，膜片厚度为1.2 μm，作为探测声振动信息的敏感部件和干涉微腔的反射面。传感器灵敏度达到93 mV/Pa，线性度为99.8%，在1~20 kHz范围内具有较平坦的频率响应。利用设计的光纤声振动传感器在空间环境模拟器中进行了水升华器监测实验，结果表明该传感器在温度为77 K的空间冷黑环境中可以存活，能够实时探测到水升华器喷冰故障所产生的声振动信号。

For the monitoring requirements of water sublimator, a fiber optic acoustic vibration sensor is developed based on the Fabry-Perot interference microcavity. The low temperature resistant polymer film material is used to make a ultra-thin diaphragm by stretching around as the sensitive components to detect acoustic vibration information and reflecting surface of interference microcavity. The diaphragm is 1.2 μm in thickness. The sensitivity of system is 93 mV/Pa, and the linearity is up to 99.8%. A relatively flat frequency response is achieved from 1 kHz to 20 kHz. The monitoring experiment of water sublimator in the space environment simulator show that the sensor can survive in space environment where the temperature is below 77 K, and detect the real-time acoustic vibration signals generated by spewing ice when the water sublimator is going wrong.