介绍了上海光源硬X射线微聚焦光束线站（BL15U1）的高精度样品定位系统。 该系统由离线样品显微镜系统、 在线样品实验系统和高精度定位样品架三部分组成。 通过编译控制程序、 样品架定位、 坐标转换， 将样品的在线X射线荧光成像实验和离线显微镜观察进行有效结合， 首次在国内同步辐射装置上实现样品在微米范围内的快速离线定位。 该系统帮助科研工作者在利用微束X射线研究物质微区特征时， 快速准确地寻找微区研究对象。 利用金网进行X射线荧光成像实验， 对比离线高倍显微镜下金网各结点的坐标， 对样品定位系统的精度进行验证。 结果表明， 该样品定位系统在X方向的平均误差为1.3 μm， Z方向的平均误差为2.5 μm。 该系统不仅简便快速、 准确可靠， 节约宝贵的实验时间， 也为同步辐射微聚焦线站开展样品自动对焦方法提供技术前提。

A novel sample offline positioning system was developed for hard X-ray micro-focus beamline (BL15U1) at Shanghai Synchrotron Radiation Facility (SSRF). The positioning system is composed of three parts: off-line sample microscope system, on-line sample experiment system, and high-precision positioning sample holder. It makes a potent combination of the on-line X-ray fluorescence imaging and the off-line microscopic examination in three steps: compiling of control program, positioning of sample holder, and conversion of the two coordinates. It’s the first time in the domestic synchrotron radiation facilities to achieve sample offline positioning in micron scale. The system helps the researchers find the object of study in micro zone quickly and accurately, when they study the micro characteristics of materials using synchrotron radiation micro X-ray beam. The gold mesh was used as an object of study. By comparing the differences of coordinates of gold mesh nodes between pictures from offline microscope and pictures from X-ray fluorescence mapping, the accuracy of the offline positioning system was verified. The results showed that the average errors of X-axis and Z-axis were 1.3 and 2.5 μm respectively, using the positioning method. It was demonstrated that the sample offline positioning system not only is suitable for these applications with high efficiency, but also supply hard X-ray micro-focus beamline with the technical preparations of sample automatic focusing method.