设计了一种基于InP 衬底的1.55μm 短腔垂直腔面发射激光器(VCSEL),先从结构上对上下反射镜进行了优化设计,然后重点对谐振腔的腔长进行了优化,采用1λ短腔结构,用Matlab软件进行了仿真,结果表明:优化后的VCSEL器件的输出功率为2.22mW, 饱和松弛响应频率fR,sat为34.5GHz, 最大-3dB带宽为30.5GHz, 与目前此波段的最大带宽(19GHz)相比, 提高了约60%。

The design of the short-cavity vertical cavity surface emitting laser (VCSEL) based on InP substrate in 1.55μm waveband is presented. The optimizations of the top and bottom mirrors and the resonant cavity length were implemented, and then the resonant cavity length was optimized. Finally, the VCSEL with the 1λ micro-cavity structure was employed and simulated with Matlab software, and the simulation results show that the output power of the VCSEL is enhanced to 2.22mW, the saturated relaxation response frequency fR,sat is 34.5GHz, and the maximum -3dB bandwidth is 30.5GHz, which increases by about 60% compared to the existing maximum bandwidth (19GHz) in this waveband.