本文以拉曼光谱, PL光谱等表征手段研究准分子激光辐照氧化锌晶格微结构及其光谱性能的影响。当能量密度超过一定阈值时, 会造成晶格畸变, 诱导产生附加的拉曼振动模式: 布里渊区A点的TA模, 位于70 cm-1左右以及500~600 cm-1之间的LO模。准分子激光辐照与未辐照区之间存在晶格畸变逐渐减弱的过渡区。采用共聚焦的方法, Z-向逐点扫描, 可以估算一定激光能量密度下, 辐照对氧化锌材料的影响区深度。

In this paper, the Raman and PL spectra were carried out to investigate the influence of the excimer laser irradiation on the microstructure and the spectroscopy properties of ZnO crystal. When the laser irradiation density was beyond the threshold, the new additional modes, including TA (A) located at 70 cm-1 and LO mode located at 500~600 cm-1 emerged arising from the disorder of the crystal lattice. Between the irradiation and as-grown area, there is a transition area in which the lattice disorder was decreased gradually. Using the Raman confocal method, through the Z direction mapping scan, the influence depth of the excimer laser irradiation on the ZnO could be estimated at a certain laser irradiation density.