中国激光, 2014, 41 (4): 0408004, 网络出版: 2014-03-14   

双频激光干涉测量中的环境补偿技术

Environment Compensation Technologies in Dual-Frequency Laser Interferometer Measurement System
作者单位
1 清华大学机械工程系, 北京 100084
2 上海微电子装备有限公司, 上海 201203
摘要
作为一种超精密的非接触式测量设备,双频激光干涉测量系统可以在保证纳米级测量精度的情况下实现大范围和高速度测量,因而获得非常广泛的用途。环境是影响激光干涉测量系统测量精度的最大因素,为了获得纳米测量精度,必须对测量环境进行补偿。因此,重点研究了环境补偿技术,并研制了一种新型波长跟踪器,与Edlen经验公式进行对比测试,结果表明新型波长跟踪器具有良好的补偿效果。采用自制波长跟踪器补偿之后,被测运动台伺服精度可达1.61 nm。
Abstract
As a super-precision and un-touched measuring system, dual-frequency laser interferometers with the advantages of high accuracy, large-scale and high measurement speed plays an important role in many fields. It is well known that environments such as temperature, air pressure and humidity play the most influence on measurement precision of dual-frequency laser interferometer. In order to improve precision, environments must be controlled and compensated. The environment compensation technologies are described and a novel wavelength tracker is developed. The test results contrasted with Edlen show that the novel wavelength tracker has good effects on environmental compensation. Moreover, the servo controlling precision of moving stage measured by dual-frequency interferometer compensated with the novel wavelength tracker is 1.61 nm.

池峰, 朱煜, 张志平, 高为宫. 双频激光干涉测量中的环境补偿技术[J]. 中国激光, 2014, 41(4): 0408004. Chi Feng, Zhu Yu, Zhang Zhiping, Gao Weigong. Environment Compensation Technologies in Dual-Frequency Laser Interferometer Measurement System[J]. Chinese Journal of Lasers, 2014, 41(4): 0408004.

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