利用双光束复合脉冲激光辐照石墨悬浮液沉积技术，制备了高效率、高质量的纳米金刚石薄膜，成功解决了金刚石薄膜沉积不均匀和衬底温度对金刚石薄膜的影响。通过拉曼光谱仪和高分辨率透射电镜对薄膜的微观结构和组成进行了检测分析，实验结果表明，Raman光谱的D峰出现在1334 cm-1处,G峰出现在1571 cm-1处，沉积的薄膜致密均匀，晶粒平均尺寸在5 nm左右。在制备过程中通过复合激光束辅以温度为金刚石薄膜的生长提供了更有利的条件，并在常温常压下连续制备出了粒度分布均匀的纳米金刚石薄膜。

High-quality and large area nano-diamond film is prepared via double beam pulse laser irradiation of graphite suspension. The inhomogeneity of diamond films and influence of substrate temperature are improved. The microstructure and composition of the diamond films are detected by the visible Raman spectroscopy and higher solution transmission electron microscopy. The experimental result demonstrates that the Raman spectroscopy reveals that disorder peak is at 1334 cm-1 and graphite peak is at 1571 cm-1, the diamond film is compact and homogeneous, its average crystalline grains are around 5 nm. The composite beam provides moderate temperature for the growth of diamond films, and the continuous synthesis of homogeneous nano-diamond films is realized at normal temperatures and pressures.