中国激光, 2014, 41 (s1): s102002, 网络出版: 2014-12-04
准贝塞尔光束在激光微加工中的理论分析
Theoretical Analysis of Quasi-Bessel Beam for Laser Micromachining
摘要
准贝塞尔光束具有能够远距离传输且保持光束宽度不变的特性,可以提供较大的光束纵横比,非常适合材料的激光微加工。研究了由理想轴棱锥和实际轴棱锥产生的准贝塞尔光束的传输特性。研究发现实际轴棱锥形成的准贝塞尔光束因干涉导致其轴上能量密度呈现强烈振荡的现象。重点分析了准贝塞尔光束在激光微加工中潜在的应用,通过推导获得的解析表达式可以用来预测激光加工所需的各项参数,包括激光脉冲能量、能量密度分布、消融宽度和光束纵横比等。
Abstract
A quasi-Bessel beam can propagate over a long distance with its beam width unchanged, which provides a high beam aspect ratio, and is suitable for laser micromachining of structures. The propagation properties of quasi-Bessel beam generated by the ideal axicon and blunt-tip axicon are investigated. Strong peak oscillations occur due to interference between the quasi-Bessel beam and the refracted beam by the blunt-tip. Using the axicon for laser micromachining is theoretically calculated. Simple analytical formulas can be used to predict the required parameters, including laser pulse energy, generated fluence distribution, ablation width, beam aspect ratio and so on.
吴平辉, 黄文华. 准贝塞尔光束在激光微加工中的理论分析[J]. 中国激光, 2014, 41(s1): s102002. Wu Pinghui, Huang Wenhua. Theoretical Analysis of Quasi-Bessel Beam for Laser Micromachining[J]. Chinese Journal of Lasers, 2014, 41(s1): s102002.