纳米球刻蚀技术和磁控溅射方法在普通玻璃衬底上制备有序氧化锌(ZnO) 纳米阵列。利用扫描电子显微镜对样品表面形貌进行了观测，并对样品进行荧光(PL)光谱测试。结果表明，相比于普通ZnO薄膜，ZnO纳米阵列的有序结构可以提高在紫外区域的发光性能，减少蓝绿光的发射缺陷。研究了不同ZnO纳米阵列粒径大小和不同ZnO纳米阵列的厚度对其光学性质的影响。溅射时间30 min的有序ZnO纳米阵列样品的质量和结晶状态较好，随着聚苯乙烯(PS)纳米球粒径的减小，样品吸收峰和荧光光谱均发生“蓝移”。

Using nanosphere lithography and magnetron sputtering technique, ordered ZnO nanoparticle arrays are fabricated on normal glass substrates. The surface morphology under scanning electron microscope (SEM) is observed. The fluorescence (PL) spectra of samples is tested. The result shows that comparing with the ordinary ZnO thin film, the structure of ordered ZnO nanoparticle arrays improves the luminescent properties in the ultraviolet region and reduces the defects of blue-green light emission. The influences of different heights of ZnO nanoparticle arrays and different sizes of colloidal spheres masking on luminescence properties of ordered ZnO nanoparticle array samples are studied. The quality of ordered nanoparticle array samples are good at the condition of 30 min sputtering time. The absorption spectra and fluorescence spectra exhibit a blue shift as the size of polystyrene (PS) nanoparticle decreases.