激光与光电子学进展, 2014, 51 (6): 061204, 网络出版: 2014-05-26
光学镜面间隔测量中的色散研究
Research of Dispersion in Measurement of Optical Lens Gap
光学系统 光学干涉 色散 镜面间隔 光学装调 镜面间隔测量 短相干 optical systems optical interference dispersion lens gap optical alignment measurement of lens gap partial coherence interferometry
摘要
材料的色散会影响镜面间隔的测量精度,为了提高光学干涉法测量镜面间隔的精度,对材料色散效应进行理论分析和数值仿真,分别对LAK9、ZF6、H-ZF2、BAK7、K9 光学玻璃进行仿真测试,得到了干涉信号峰值偏移量关系式,信号峰值偏移量与材料的一阶色散系数成正比。为了验证该关系式的正确性,搭建了一个镜面间隔测量实验平台,实验测量得到的干涉信号最大值偏移量与仿真测试结果的相对误差小于2%,考虑到实验过程中的误差因素,证明仿真测试得到的结果是正确的。
Abstract
The dispersion of optical material influences the accuracy of lens gap measurement. In order to improve the accuracy of lens gap measurement, the effect of optical material dispersion is investigated by the theoretical analysis and numerical simulations. An expression of interference signal offset is obtained by numerical simulation for materials of LAK, ZF6, H- ZF2, BAK7 and K9,with the offset proportional to the first order dispersion coefficient of optical material. An experimental platform is set up to verify the simulation result, and it is shown that the relative error of interference signal offset between the experimental and simulation results is below 2% . Considering various error factors in the experiment, the relative error of 2% is reasonable and the obtained expression via simulations is correct.
郭帮辉, 李明, 孙强. 光学镜面间隔测量中的色散研究[J]. 激光与光电子学进展, 2014, 51(6): 061204. Guo Banghui, Li Ming, Sun Qiang. Research of Dispersion in Measurement of Optical Lens Gap[J]. Laser & Optoelectronics Progress, 2014, 51(6): 061204.