开发一种新型TiO2纳米线阵列干涉传感器。首先, 通过水热合成法在FTO导电玻璃表面制备了TiO2纳米线阵列薄膜。然后, 以此复合结构作为传感芯片, 利用Kretschmann 棱镜耦合结构, 构建了基于Kretschmann结构的波长调制型薄膜干涉传感器。最后, 以氯化钠水溶液为待测液体介质研究了该传感器对环境介质折射率的灵敏性能。结果表明: 该传感器对1333 5～1360 4范围内的折射率有很好的响应。TM模式下, 在0～3%与3～15%浓度范围内, 氯化钠浓度与该传感器的反射光强度分别呈现了良好的线性关系。TE模式下, 在0～3%浓度范围内, 氯化钠浓度与吸收强度存在良好的线性关系, 而波长基本不变; 而在3～15%浓度范围内, 随着氯化钠浓度的增加, 波长逐渐红移, 氯化钠浓度与波长也具有良好的线性关系。

In this work, a new TiO2 nanowire array based interferometric sensor had been developed. At first, TiO2 nanowire array films were prepared on the surface of conductive FTO glass through hydrothermal synthesis method. Then, a new type of interferometric film sensor based on wavelength modulation was constructed by utilizing the compound structure FTO glass with TiO2 nanowire array thin film as the sensing chip and making use of the typical Kretschmann prism coupling structure. Finally, the response performance of the interferometric sensor to ambient refractive index was displayed by employing sodium chloride aqueous solution as the measured liquid media. The results show that the sensor has a preferable response to refractive index over the range of 1333 5~1360 4. In the case of TM mode, there is a good linear relationship between reflectometric light intensity and NaCl concentration in the range of 0% to 3% and 3% to 15% quality percentage, respectively. For TE mode, within the range of 0 to 3% NaCl concentration, it shows a negative linear relationship between NaCl concentration and the absorption intensity while the resonant wavelength is basically unchanged; within the range of 3 to 15% NaCl concentration, with the increase of NaCl concentration, the resonant wavelength is gradually red shifted and it exhibits a positive linear relationship between NaCl concentration and resonant wavelength.