为了实现球轴承中球体在制造加工中快速准确的测量, 采用白光干涉技术、图像处理技术和信号处理技术组建了一整套的基于迈克尔逊干涉仪的测量系统。对白光干涉技术进行了理论分析, 对轴承球体进行了光学球面半径的高精度测量和粗糙度测量, 取得了光洁度图像和曲率半径图像。在大量实验论证的基础上经过处理和计算得到了精确的计算数据, 光洁度分辨率可达到纳米量级, 曲率也可以计算到微米量级。结果表明, 利用此技术可以对球面进行快速精确的测量, 提高了加工质量和检测速度。

In order to achieve rapid and accurate measurement of sphere bearing ball during manufacturing process, a set of Michelson interferometer measurement system was proposed based on white light interferometer technology, image processing technology and signal processing technology. White light interferometry technique was analyzed theoretically. The precision and roughness measurement of the optical spherical radius of sphere ball bearing were made. The finish resolution image and the curvature radius image were obtained. The accurate calculation data was obtained after processing a large number of experimental data. The finish resolution can reach the nm level and the curvature can be calculated to the μm level. The processing quality and the detection speed are improved.