激光与光电子学进展, 2014, 51 (10): 101403, 网络出版: 2014-09-10
高功率准分子激光MOPA系统中的三路激光准直技术研究
Research on 3-Ray Automatic Alignment in High Power Excimer Laser MOPA System
摘要
光束自动准直是大型激光装置中的重要组成部分。以准分子(XeCl)激光主振荡功率放大(MOPA)系统中一个典型的像传递单元为例，着重介绍了准直基准的建立、3 路激光自动准直的原理、电荷耦合元件(CCD)图像采集与分析处理。通过实验验证，该准直单元准直效率高，准直精度能够满足MPOA 系统的光束准直要求。
Abstract
Automatic alignment of laser beam is an important part of the large laser device. Taking classical imagerelaying unit in an excimer (XeCl) laser master oscillator power-amplifier (MOPA) system as an example, the establishment of alignment benchmark, the automatic alignment principle of 3-ray and charge-coupled device (CCD) image acquisition and processing method are introduced. It has been proved by the experiment results that this alignment unit can appease the request of laser automatic alignment of MOPA system.
钱航, 王大辉, 马连英, 张永生, 赵学庆, 朱永祥, 易爱平. 高功率准分子激光MOPA系统中的三路激光准直技术研究[J]. 激光与光电子学进展, 2014, 51(10): 101403. Qian Hang, Wang Dahui, Ma Lianying, Zhang Yongsheng, Zhao Xueqing, Zhu Yongxiang, Yi Aiping. Research on 3-Ray Automatic Alignment in High Power Excimer Laser MOPA System[J]. Laser & Optoelectronics Progress, 2014, 51(10): 101403.
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