为了提高以聚甲基丙烯酸甲酯(PMMA)和聚二甲基硅氧烷(PDMS)为材料的微流体通道的浸润性，通过溅射SiO2对PMMA和PDMS进行了表面亲水改性处理。首先，对PMMA和PDMS进行氧等离子刻蚀，改变其表面形貌；然后，溅射SiO2进行表面亲水改性处理，由不同溅射时间得到不同厚度的SiO2薄膜。在亲水处理后一段时间之内对PMMA和PDMS表面分别进行接触角测量，评价不同条件下的改性效果，并对改性后的样片进行黏接性测试。结果表明：氧等离子刻蚀后，溅射时间10 min以上的PMMA表面可在10天内保持极亲水的状态；溅射时间15 min后的PMMA在35天之内接触角不超过10°；PDMS的亲水性可保持10天，接触角不超过60°；高温老化处理能延缓PDMS表面疏水性的恢复。实验结果显示：氧等离子刻蚀之后，溅射SiO2的方法可使PMMA和PDMS获得较长时间的表面亲水改性效果。另外，亲水改性处理后的PDMS之间仍可实现有效黏接，改性PMMA与未改性PDMS也能有效黏接。

To improve the wettability of micro channels made of Polymethyl Methacrylate(PMMA) and Polydimethylsiloxane(PDMS), the wettability of PMMA and PDMS surfaces was modified through sputtering silicon dioxide. Firstly, the surfaces of PMMA and PDMS were etched with an oxygen plasma to change their surface morphologies and enhance the roughnesses. Then, a thin layer of silicon dioxide was sputtered on their surfaces for hydrophilic modification and the silicon dioxide layers with different thicknesses were obtained by different sputtering time. The contact angles of the PMMA and PDMS surfaces were measured within a period of time after the hydrophilic treatment, and the effects of hydrophilic modification under different conditions were evaluated. Finally the adhesivity of the modified samples was tested too. The experimental results show that the surface of PMMA after oxygen plasma etching remains extremely hydrophilcity during 10 days via 10 min dioxide sputtering, and the contact angle remains lower than 10° in 35 days with 15 min sputtering. The modified PDMS remains hydrophilcity and the contact angle lower than 60° for 10 days. The aging treatment delays the recovering of the hydrophobicity of PDMS. By silicon dioxide sputtering, the PMMA and PDMS after oxygen plasma etching achieves longer hydrophilic modification efficiency. Moreover, after hydrophilic modification, both modified PMMAs, or pristine PDMS and modified PDMS could be bonded effectively.