针对光学元件的亚表面缺陷,结合基于激光共焦层析的亚表层检测方法,建立聚焦光束在亚表面损伤介质中的传输模型,并采用有限元分析方法,仿真研究K9玻璃光学元件亚表层缺陷对聚焦光束的散射调制特性,特别对颗粒状和微裂纹两类特殊缺陷的光学调制特性进行研究和分析,探索了波长、缺陷大小、缺陷折射率及缺陷方向对聚焦光束散射特性的影响规律,通过分析包含亚表面损伤缺陷信息的光场分布图和强度变化曲线,获得了亚表面损伤缺陷的信息,并对其进行评价。

It order to solve the problem of scattering modulation of subsurface damage in optical elements, the transmission process of light beam in the subsurface damage medium is simulated using the finite element method. The effect of different factors on the light scattering characteristics of focused light beam in media with subsurface defects is studied. The information of subsurface damage can be obtained and evaluated through optical field distribution and variation curves of intensity that contain information of subsurface damage. These research results provide an important theoretical guidance for the exploration of high feasibility, practical, quantitative, nondestructive detection technology of the subsurface damage.