光学学报, 2014, 34 (12): 1222002, 网络出版: 2014-10-08
长焦距测量系统的像差误差校正方法研究
An Error Calibration Method against Aberration in Long Focal Length Measurement
摘要
针对长焦距测量中被测透镜像差引入的焦距测量误差提出了一种校正方法。传统长焦距测量中使用高斯公式来计算被测透镜的焦距值,未考虑被测透镜像差引入的误差。在采用发散光作为测量光束的大口径光学元件焦距测量中,该误差成为了影响测量精度的重要因素。详细分析了基于发散光和泰伯效应的长焦距测量法,利用数值方法获得了误差修正值,并与Zemax的仿真结果进行了对比。利用Visual C++编程,实现了测量结果的自动校正功能。对名义焦距值为13500 mm和31251 mm透镜的测量数据分别进行校正后,其相对于名义焦距值的测量精度分别优于0.007%和0.022%。将校正后的测量精度与干涉仪法的测量精度进行了对比,结果充分说明了该方法是可靠和有效的。
Abstract
A high accuracy calibration method for errors resulted from aberration in long focal length measurement, is presented. Generally, Gaussian equation is used for calculation without consideration of the errors caused by aberration. However, the errors become the key factor affecting the accuracy in the measurement system, based on divergent light, of a large aperture and long focal length lens. An effective way is proposed to calibrate the errors, with detailed analysis of the long focal length measurement based on divergent light and Talbot interferometry. Aberration errors are obtained by numerical method and compared with results simulated by Zemax. Then, auto-correction is achieved with the help of Visual C++ software and the modified measurement results of 13500 mm focal length lens and 31251 mm focal length lens reveal that the relative accuracy is better than 0.007% and 0.022%, respectively. By comparing the modified relative accuracy with relative accuracy obtained in interferometer measurement, the proposed method is proved to be highly effective and reliable.
江瑶, 白剑, 罗佳, 李强. 长焦距测量系统的像差误差校正方法研究[J]. 光学学报, 2014, 34(12): 1222002. Jiang Yao, Bai Jian, Luo Jia, Li Qiang. An Error Calibration Method against Aberration in Long Focal Length Measurement[J]. Acta Optica Sinica, 2014, 34(12): 1222002.