静电电压表对测量交直流高压有着非常重要的作用。为了实现高电压静电电压表的精确测量，提出并制备了一种采用法布里珀罗(FP)腔干涉原理的静电电压传感器。所设计的传感器电极与高压电极构成一组静电电压测量电极，此传感器的FP腔由光纤准直器和外侧镀铝的聚酯膜构成，当在高压电极施加载荷时，聚酯膜与高压电极之间产生均匀电场，在电场力作用下聚酯膜产生形变，从而改变FP腔的腔长，造成FP传感器的输出光谱偏移，采用相位解调法获得高压电极上施加的载荷，实现电压的静电测量。实验结果表明：可实现5~16 kV直流高压和交流高压有效值的测量，5~10 kV范围测量精度为1.21%，10~16 kV的测量精度为0.61%。此传感器满足高电压的测量要求。

Electrostatic voltmeter plays an important role in the measurement of atternating current (AC) and direct current (DC) high voltage. In order to achieve highly precise measurements in a wide range, an electrostatic voltage sensor using Fabry-Perot (FP) cavity interferometry principle is proposed and fabricated. The measurement electrodes consist of a sensor electrode and a high voltage electrode. FP cavity of the sensor is formed by optical collimator and polyester film aluminized outside. When the high voltage electrode is applied, uniform electric field is produced between polyester film and high voltage electrode. Under the pull of electric field, the shape of polyester film is deformed and the length of FP cavity changes, causing the output spectrum shift of the FP sensor. Phase demodulation method is used to obtain high voltage applied to electrode and realize the electrostatic voltage measurement. The experimental results show that the sensor can measure DC voltage and AC root-mean-square voltage in 5~16 kV. The measurement accuracy is 1.21% of 5 kV to 10 kV and 0.61% of 10 kV to 16 kV. The sensor satisfies the requirement of high voltage measurement.