介绍了硅光子互连中4 种波分复用器及相关单片集成发射接收芯片，其中硅纳米线阵列波导光栅及刻蚀衍射光栅波分复用器单个芯片就可以成倍扩展通道数，非常适合大通道数密集波分复用，马赫-曾德尔结构及微环谐振型波分复用器芯片通道数增大时需要多个单元级联，波长准确性及间隔不易控制，比较适合通道数少的芯片应用。同时，给出了自主设计和制备的硅纳米线阵列波导光栅和刻蚀衍射光栅，通过采用阵列波导展宽方法，有效抑制了阵列波导的串扰，实现串扰小于-15 dB；通过在刻蚀衍射光栅反射面引入二维光子晶体反射镜，降低了刻蚀衍射光栅的反射损耗，损耗比普通刻蚀衍射光栅减小了3 dB。

Four kinds of wavelength division multiplexer in silicon photonics are introduced, the silicon nanowire arrayed waveguide grating and the etched diffraction grating can increase output channels easily, which fits to high count dense wavelength division multiplexer application; multi-count Mach-Zehnder inteferometer (MZI) and micro-ring wavelength division multiplexer need to be cascaded, but they can not control their wavelength and channel space easily, which fits to low count application. Meanwhile, the silicon nanowire arrayed waveguide grating and the etched diffraction grating are designed and fabricated. The crosstalk of the arrayed waveguide grating by widening the arrayed waveguide width is less than -15 dB, and the insertion loss is reduced by 3 dB using a 2D photonic crystal mirror. Besides, the related monolithic silicon photonic chips are also shown.