Chinese Optics Letters, 2014, 12 (11): 112302, Published Online: Oct. 22, 2014
Fabrication of low threshold current monolithic DFB laser with an MMI combiner
230.0250 Optoelectronics 250.5300 Photonic integrated circuits 230.7390 Waveguides, planar 250.5960 Semiconductor lasers
Abstract
We fabricate low threshold current monolithic distributed feedback (DFB) laser with a multi-mode interface (MMI) combiner using butt-joint metal-organic chemical vapor deposition technology with different waveguide structures. Multi-layer mask self-aligned photolithography technology is used to form different waveguides in active and passive regions, respectively. The result shows that the laser threshold current is lower than 10 mA, with 50 dB side-mode suppression ratio.
Jianyi Zhao, Xin Chen, Ning Zhou, Xiaodong Huang, Wen Liu. Fabrication of low threshold current monolithic DFB laser with an MMI combiner[J]. Chinese Optics Letters, 2014, 12(11): 112302.