提出了一种在实验室环境下模拟工业现场在线测量多晶硅还原炉内硅棒直径的检测系统。该系统 采用双目立体视觉测量的方法,首先采用双CCD获取硅棒模型的实时图像,并依次进行摄像机的标定、 特征点的提取、立体匹配、然后通过特征点的三维坐标计算硅棒模型的直径。实验结果表明,硅棒 直径的测量结果达到了还原炉工艺参数自动化控制所需的精度,并且该测量系统有效地 避免了人工长时间目测造成的劳动强度大以及由于主观因素造成误差较大的缺点。

At the scene of the laboratory simulation industry, an online detection system for the measurement of silicon rod diameter in polycrystalline silicon reduction furnace is proposed. The method of binocular stereo vision is used in the system. Firstly, double CCD is used to get real-time image of silicon rod model, calibration of the camera, extraction of the characteristic points, stereo matching in turn, then the diameter of silicon rod model is calculated through three-dimensional coordinates of feature points. The experimental results show that, silicon rod diameter measurement results achieved the required precision of reduction furnace process parameter automatic control, and the proposed system effectively avoided several factors such as artificial observation for a long time and errors due to subjective factor.