基于道威棱镜扫描原理, 设计了由高速旋转电机驱动三片K字形排布反射镜组成的反射式扫描装置, 并分析了扫描钻孔准确度.结果表明: 该扫描装置可用于飞秒激光高准确度环切钻孔系统, 钻孔准确度不受光束质量影响, 钻孔扫描速度二倍于电机转速且钻孔效率高、兼容多光谱波段; 与道威棱镜系统相比, 该系统装调准确度要求低, 能避免透射系统中色散引起的飞秒激光脉宽展宽现象.测试结果显示该装置可以实现直径0.05~0.2 mm、加工准确度小于±2 μm倒锥孔的高效率加工.

Based on the Dove Prism scanning principle, a reflective scanning device was designed which was driven by high speed rotating motor and composed of three reflectors in K glyph configuration. The scanning device can be used for the femtosecond laser high-precision spiral drilling system and the accuracy is insensitive to the laser beam quality. The drilling scanning speed is twice as the motor speed with high drilling efficiency. Compared with Dove Prism System, the scanning device is easy to assemble and can avoid the pulse width broadening phenomenon of femtosecond laser. The tests show that it can accomplish high effective drilling the inverted cone micro holes whose diameters are between 0.05 mm and 0.2 mm with the machining accuracy less than ±2 μm.