量子电子学报, 2014, 31 (5): 520, 网络出版: 2014-10-23
凸非球面辅助面的背向零位检验分析
Convex asphere back null compensation testing with auxiliary surface
摘要
在现代光学检测中,凸非球面的检测一直是一个难点。辅助面的背向零位检测方法, 从三级像差理论出发,通过计算非球面的法距差,来探讨辅助面对凸非球面法距差的补偿校 正能力。这种检验方法可用于偏心率-1/n2
Abstract
Convex aspheric surface testing is very difficult. In order to obtain better wavefront error, a method including back null compensation with auxiliary surface was proposed. This method, based on third-order aberration theory, the ability of auxiliary surface to compensate the normal aberration of convex asphere with eccentricity of -1/n2
姚劲刚, 胡文琦, 叶璐, 郑列华. 凸非球面辅助面的背向零位检验分析[J]. 量子电子学报, 2014, 31(5): 520. YAO Jin-gang, HU Wen-qi, YE Lu, ZHENG Lie-hua. Convex asphere back null compensation testing with auxiliary surface[J]. Chinese Journal of Quantum Electronics, 2014, 31(5): 520.