应用光学, 2014, 35 (5): 858, 网络出版: 2014-10-23  

基于外差干涉的微振动测量技术研究

Micro-vibration measuring technology based on heterodyne interference
作者单位
1 中北大学 信息与通信工程学院,山西 太原 030051
2 中北大学 电子测试技术重点实验室,山西 太原 030051
摘要
针对外差干涉的微振动测量存在稳定性低、严重受环境噪声影响等缺点,提出了对光路的改进方案。根据差分原理将其改为双光路,消除环境噪声的干扰;通过偏振分光棱镜(PBS)将椭圆偏振光变为线偏光,提高干涉信号幅值;改进频移装置(AOM),抑制频率漂移;增加光阑,滤除杂散光,提高系统信噪比。通过探测5 kHz压电陶瓷振动信号,以及2.5 MHz高频激光超声信号进行实验验证,结果表明:信号稳定且无纹波,系统分辨率为2.3 nm,信噪比提高16.7倍。两路干涉信号幅值分别为552 mV和736 mV,较传统外差干涉信号幅值提高近10倍,有利于纳米量级微振动信号的检测。
Abstract
Aiming at the problem that the micro-vibration based on heterodyne interference has low stability and is easily impacted by environmental noise, the ideas of optical path improvement were given. According to the difference principle, the single optical path was converted to a double optical path, in which the environmental noise was eliminated; The elliptically polarized light was changed into linearly polarized light to improve the interference signal amplitude by the polarization splitting prism (PBS); The acousto-optic modulator(AOM) was improved to inhibit frequency drift;The stray light was suppressed by using diaphragm filters so as to improve the system signal-noise ratio (SNR). The verification experiments were conducted through detecting 5 kHz piezoelectric vibration signal and 2.5 MHz laser ultrasonic signal .Experimental results indicate that signal is stable and has no ripple,the resolution is 2.3 nm and the SNR has improved by 16.7 times. The amplitudes of double-channel heterodyne interferometer signal is 552 mV and 736 mV, respectively, which are larger than traditional one nearly 10 times, it is advantageous to measure nanometer micro-vibration signals.

刘丹, 郑宾, 郭华玲, 刘辉, 刘乃强. 基于外差干涉的微振动测量技术研究[J]. 应用光学, 2014, 35(5): 858. Liu Dan, Zheng Bin, Guo Hualing, Liu Hui, Liu Naiqiang. Micro-vibration measuring technology based on heterodyne interference[J]. Journal of Applied Optics, 2014, 35(5): 858.

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