使用红外透过差示光谱法，对低羟基石英基片上的有机物吸收峰进行了定量测量表征。从理论上研究了该方法的可行性和特点，并初步检验了该方法的灵敏度。利用这种手段采集了大量真空精密干冰清洗石英基片的数据，统计发现这些数据能够体现一定的规律性：干冰清洗有机物的效果与原始污染状况紧密联系，某一时刻污染物越多，清洗效率越高;无机物或大颗粒的混入会降低有机物清洗效率;表面形态也能够影响清洗效率。这些成果证明了该定量表征方法的正确性和实用性。实验过程和所得结论表明，将清洗初始状态控制在相对一致的状态下，是精密干冰清洗定量研究和工程化参数优化的一个重要因素。

A given kind of silica substrates, which low hydroxy group is contained by, was made quantitative analysis by the way of infrared differential spectroscopy. Some characteristic absorption peaks of methylene and methyl were measured as a measurement of organic compound. As many data before and after fine CO2 jet spray cleaning were obtained, some rules appeared statistically. Cleaning rate connects to polluted degree. The higher the polluted degree is, the faster the cleaning rate is. Cleaning rate can also be reduced by the mixture of mineral and big particles. Furthermore, topography affects cleaning rate, too. All of them support the research method, and the process and results claim that for research and production process optimization, it is very important to find a way to insure the consistency of polluted degree on the surface before fine CO2 jet spray cleaning.