针对立方相位板的曲面特征,基于波前传感方法设计了面形测量系统。提出了波前数据到曲面面形的映射模型,借助图像处理方法有效地提高了测量的动态范围,实现了较大曲率的立方相位板面形精度的超精密测量。仿真分析表明,该模型的转换精度同传统算法相比提高了2~3倍,测量的动态范围提高了4倍,且仍有提高空间。最后搭建的实验系统实现了实际立方相位板面形的测量,通过与Wyko白光干涉仪的测量数据对比,验证了测量的准确性。

A surface measurement system is designed according to the features of cubic phase plate surface based onwavefront sensing technology.A mapping model from reflected wavefront to surface shape is presented,and in order tomeasure surface with greater curvature,an algorithm based on image processing method is proposed to improve the dy-namic range of the wavefront sensor.Simulation analysis shows that the conversion accuracy of the proposed mappingmodel is 2~3times better than traditional algorithm and the dynamic range is increased nearly 4times.Finally,an experi-mental system is built to measure the surface of an actual cubic phase plate,the result compared with the data achieved byWyko white light interferometer verifies the correctness and accuracy of the measurement system.