对薄膜测厚系统进行了详尽剖析, 从整体上论述了膜厚测量系统, 研究了测厚系统中薄膜测厚仪的关键硬件电路, 对薄膜测厚仪的软件流程进行了离散设计。以AVR单片机为核心处理器进行了数据采集和处理, 设计并生产出了在线式光学薄膜厚度测量与监控系统。通过与实际膜厚进行对比实验, 验证了薄膜测厚系统具有高精度、高稳定性和高可靠性, 可应用于实际工业生产。

The thin film thickness system is analyzed in detail, and the film thickness measuring system is discussed on the whole. The key parts of hardware circuit is studied in film thickness instrument of thickness measuring system, and the software flow of the film thickness instrument is designed discretely. The AVR microcontroller as the core processor for data acquisition and processing, the on-line optical thin film thickness measurement and monitoring system is designed and manufactured. By contrast experiment with the actual film thickness, it is verified that the thin film measuring system has high precision, high stability and high reliability. It can be applied to practical industrial production.