通过将闪烁体光纤面板与CMOS图像传感器耦合,研制了在线诊断X射线图像的CMOS探测系统。通过XOP软件计算,确定了响应能区为1~10 keV的CsI闪烁体厚度为30 μm。在微点X射线源平台上,基于标准的Typ 18-d型分辨率板对CMOS探测系统的空间分辨能力进行了实验测试,结果为60 μm。在神光Ⅲ原型激光装置上,利用该套CMOS探测系统在流体力学不稳定性与混合实验中对钛背光源的光谱进行了诊断,获得了清晰的类氢和类氦光谱图像。数据分析显示,实测的谱分辨为442,与理论分析符合较好。CMOS探测系统小巧轻便,性价比高,适合各大高校与科研院所用于在线诊断软X射线图像。

The CMOS detector systems have been introduced for diagnosing on-line soft X-ray imaging signals by coupling fiber optic plate covered scintillator and CMOS image sensor. The thickness of CsI scintillator was confirmed to be 30 μm according to XOP program calculation in 1-10 keV energy range. Based on the micro-point X-ray source, the spatial resolution of the systems was found to be 60 μm using Typ 18-d standard resolution test target. The CMOS detector systems were applied in hydromechanical instability and mixture research on shenguang-Ⅲ prototype facility to diagnose Ti spectra of backlit source. The H-like and He-like spectra were recorded clearly. The data analysis showed the experimental spectral resolution(Δλ/λ)that was about 442 nearly accorded with that of the theoretical model. The CMOS detector systems are suitable for universities and scientific academies in on-line soft X-ray diagnosis since they have obvious advantages such as small volume, high performance and low price.