蓝光激光器在生物工程、激光显示屏、激光医疗以及侦查通讯等众多领域都有着重要应用，而谐振腔作为激光器的重要组成部分，如何合理有效地激发出蓝光更是研究的重点。针对蓝光激光器的使用要求，以Nd:YAG作为基底，Ta2O5和SiO2分别作为高低折射率材料，利用电子束真空镀膜设备，双离子源辅助沉积的方法进行谐振腔面膜的制备。借助膜系设计软件对实验进行模拟分析，优化改善电场分布，减小激光对薄膜的损伤，详细地叙述了极值法累积误差产生的原因，以及镀膜材料的色散引起的短波区和长波区的监控差异，通过分析折射率所引起的光学厚度变化，调整修正因子，最终制备出了光谱性能好，吸收小，化学性能稳定的滤光膜，满足蓝光激光器的使用要求。

The blue laser has significant meaning in the application fields of biological engineering, laser screen, laser medical technology, investigation, communication and many fields of science. The resonant cavity is an important component of laser, how to make it work effectively turns to be a major subject. Aimed at the operating requirements of blue laser cavity surface film, based on Nd:YVO4, Ta2O5、SiO2 are chosen as coating materials. The films are prepared by vacuum coating equipment and double ion beam assist deposition. Through technics feedback analysis to the test result by several simulation experiments, the electric field distribution is optimized, which can decrease the damage of thin- film from laser. The reason of extremum method cumulative error is described, as well as reasons of control differences of short wavelength range and long wavelength range. By analysising optical thickness caused by refractive index, adjust the tool factor. The filter coating with well- optical performance, low- absorb, and steady- chemical properties is prepared, which satisfy the operating requirements of blue laser.