采用不同浓度的三乙醇胺研磨液研磨石英晶体, 基于研磨垫磨损率和工件与研磨垫的磨损比, 分析了三乙醇胺浓度对石英晶体的去除率及其去除稳定性、研磨垫磨损率、磨损比、研磨摩擦系数、声发射信号和研磨后表面质量的影响。结果表明: 随着三乙醇胺浓度的增加, 工件与研磨垫磨损比先增大后减小, 石英晶体的材料去除率和去除稳定性也对应地先增大后减小, 摩擦系数先减小后增大, 声发射信号先增加后减小, 研磨后工件表面质量先变好后变差。当三乙醇胺浓度为5%时, 石英晶体的材料去除率最大, 去除率随时间变化最稳定, 研磨垫使用寿命最长, 表面质量最好。结果表明: 研磨液中添加适量的三乙醇胺, 会稳定石英晶体加工过程, 延长研磨垫使用寿命, 提高工件表面质量, 降低生产成本。

The triethanolamine (TEA) with different concentrations was added to the slurry to lap of quartz crystal. By defining the ratio of Material Removal Rate(MRR) and Pad Wear Rate (PWR) as the wear ratio, the effects of TEA concentrations on the magnitude and stability of quartz crystal, MRR, PWR, wear ratio, Friction Coefficient (COF), Acoustic Emission (AE) and the surface quality of quartz crystal after lapping were investigated in fixed abrasive lapping process. The results show that with increasing additive amount of TEA in the slurry, the wear ratio increases first and then decreases, and the magnitude and stability of MRR for the quartz crystal have the same variation trend, too. Moreover, the COF decreases first and then increases and AE increases first and then decreases. The surface quality of quartz crystal after lapping gets first better then goes bad. When TEA concentration is 5%, the MRR of quartz crystal is the maximum and most stable, and the service life of FAP is the longest and surface quality is the best. Obtained results indicate that to add appropriate amount of TEA in the slurry will stabilize the lapping process of quartz crystal, prolong the service life of pad, enhance the surface quality of work pieces and reduce production costs in lapping process.