光学 精密工程, 2014, 22 (12): 3303, 网络出版: 2015-01-13  

进动气囊抛光的驻留时间优化

Optimization of dwell time algorithm for precession bonnet polishing
作者单位
北京航空精密机械研究所 精密制造技术航空科技重点实验室, 北京 100076
摘要
提出了一种新的进动气囊抛光驻留时间算法, 用于实现高精度的光学玻璃零件的加工。首先, 通过抛光工艺试验确定抛光去除率函数; 在矩阵迭代算法的基础上, 给定一个合适的驻留时间初值函数。然后, 采用分层阈值去除法进行驻留时间的优化求解, 并加上残余误差方差最小的判定条件, 从而得到完整的驻留时间函数。该算法适用于非球面、自由曲面等光学玻璃元件的抛光加工。用MATLAB对残余面形误差进行了仿真, 仿真结果表明残余误差精度PV值可以收敛到0.1 μm左右。最后, 对光学玻璃平面进行了抛光。实际抛光后, 该玻璃表面粗糙度Ra从抛光前的0.159 μm减小到0.024 μm, 面形精度PV值由抛光前的0.756 μm减小到0.158 μm。得到的结果验证了提出驻留时间算法的合理性, 表明该算法可为以后进行复杂面形工件的气囊抛光研究提供理论基础。
Abstract
A key dwell time algorithm in bonnet polishing was investigated to get the high-precision optical surface. Firstly, the removal function of bonnet polishing was acquired from the process experiments. Based on the matrix iteration, an appropriate initial dwell time function was given to calculate the dwell time with the liminal removal method . Then, the variance of the residual error was considered to optimize the result of dwell time function and to acquire the dwell time function quickly.The method is suitable for polishing the optical elements such as aspheric surface, and free-form surface. A simulation experiment was performed on a residual surface error through MATLAB, and the results show that the residual error PV value has reached up to 0.1 μm. Finally, an optical glass surface was processed on the bonnet polishing machine developed by ourselves, and results show that its surface roughness Ra is reduced from 0.159 μm to 0.024 μm and the PV value from 0.756 μm to 0.158 μm. Moreover, the rationality of the dwell time algorithm was verified. It demonstrates that the matrix-based algorithm satisfies the requirement of optical precision machining very well and provides theoretical basis for bonnet polishing of complex optical elements.

张利鹏, 杨辉, 鲍龙祥, 李静. 进动气囊抛光的驻留时间优化[J]. 光学 精密工程, 2014, 22(12): 3303. ZHANG Li-peng, YANG Hui, BAO Long-xiang, LI Jing. Optimization of dwell time algorithm for precession bonnet polishing[J]. Optics and Precision Engineering, 2014, 22(12): 3303.

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