目前影响高精度干涉仪测量精度的一个重要因素是系统的相干噪声, 为了提高干涉检测精度, 必须抑制系统的相干噪声。环形光源作为一种抑制相干噪声的有效手段已被广泛应用工程实践。本文利用 Zemax干涉仪建模分析了环形光源不同环半径对干涉测量精度影响, 并分析了在一定环半径下, 随着干涉腔长的增加, 对干涉测量结果的影响。仿真分析结果表明, 随着环形光源环半径的增加, 干涉测量结果的系统误差增大, 在同一环半径下, 随着干涉腔长的增加, 干涉测量的系统误差增大。

One of the most important factors for influencing interferometer measurement accuracy is coherent noise recently. To improve measurement accuracy, the coherent noise of interferometric system should be reduced effectively. Ring light source as an effective means to suppress the coherent noise has been widely used in engineering practice. In this paper, with different ring radius, the interference measurement accuracy is analyzed based on interferometer model. And the influence of interference measurement results increase in a certain ring radius, along with the increase of interference cavity length. Simulation results show that, with the increase of the ring light source ring radius, the system error of measurement results increase with the increase of the ring radius, in the same ring radius, with cavity length be longer, the system error of measurement is greater.