基于绝缘体上硅材料(SOI)的微环谐振腔作为各种集成微光学器件的核心部件, 其传输特性的好坏直接决定微光学器件的性能优劣。结合微环谐振腔理论和多光束干涉原理对微环谐振腔测试信号中纹波的产生原因和影响因素进行了分析, 通过耦合实验测试得到了纹波信号的特征参数并进行了分析, 实验结果与仿真分析吻合。进一步分析了耦合光栅刻蚀深度对纹波幅值的影响及原因, 为微环谐振腔结构参数的进一步优化和微环谐振腔传感系统误差分析提供了依据。

Micro-ring resonator has been attracting attentions in studies of filters, modulators, lasers, sensors and other fields owing to the characteristics of highly integrated, low power consumption and high sensitivity. The transmission characteristics of micro-ring resonator directly determine the performance of micro-optical device for its key component of various integrated optical devices. The causes of and influences on resonant spectrum of ripple noise were analyzed by the combination of micro-ring resonator theory and Fabry-Perot Interferometer (FPI). Coupling experiments were designed to obtain and analyze the free spectrum range (FSR) and amplitude of ripple noise. The experimental results show that coupling gratings are the cause of ripple noise, which is well consistent with theoretical analysis. The relationship between etching depth of coupling gratings and ripple amplitude was found and analyzed. The study provides a reference for further optimization of micro-ring resonator and error analysis of micro-ring resonator system.