依据光学薄膜理论, 建立膜系优化评价函数, 利用软件优化膜系, 实现0°-75°入射宽光谱P光分光膜的设计.选择H4和MgF2作为高低折射率材料, 采用电子束及离子辅助沉积技术, 来制备该分光膜.通过对膜层厚度误差分析, 用晶控片单独控制相对敏感度较高的膜层, 解决了薄膜制备过程中不能精确控制膜厚误差的问题.运用逆向分析法对实验测试结果进行模拟分析, 通过改变膜厚修正因子, 使P光透射光谱曲线更加平滑.光谱测试表明P光垂直入射平均透过率为60.3%, 满足系统使用要求.

Based on the optical film theory, the membrane system was introduced to optimize the evaluation function, and the TFC software was used to optimize the membrane system, so that a 0°to 75°wide spectrum of P-polarized light beam splitter was designed. In order to produce the beam splitter, H4 and MgF2 were chosen as high/low refractive index materials, and the electron beam and ion assisted deposition techniques were adopted. During the experiment, the film thickness error was analyzed and a crystal was used to control the highly sensitive layers, which solved the accuracy problem in the film preparation process. Utilizing the inverse analysis method to simulate the experimental results, the P-polarized light transmission spectrum curves become smoother by changing the thickness of the correction factor. The spectral testing shows that the average transmittance of the prepared beam filter is 60.3% with vertical incidence P-polarized light, which meets the requirements of the system.