太赫兹时域光谱(THz-TDS)技术作为一种快速发展的新型光谱分析方法在诸多领域备受关注。目前传统THz-TDS 检测时间慢，数据采集量低。为了提高THz-TDS 检测速度与精度，根据等效采样原理，设计了一种基于闭环控制的快速THz-TDS 数据采集系统。该系统可进行快速连续扫描采集，步进扫描时通过光学延迟线的信号反馈来实时获取其位置信息，完成自动化快速扫描。通过每步连续采集多个数据点来提高单步采集的准确性。结果表明，该系统充分利用了光学延迟线的硬件性能，可实现最高500 kHz 的数据采集，步长5 mm 时单步连续采集1000 个数据时间仅为86.34 ms，系统能够对太赫兹时域脉冲信号进行高精度自动化快速采集。

As a new spectral analysis method, terahertz time-domain spectroscopy (THz-TDS) is rapidly developing in many fields. Conventional THz-TDS systems have a long detection time and a small amount of collected data. To improve THz-TDS system′s detection speed and accuracy, a rapid THz-TDS data acquisition and control system based on closed-loop control are presented. The system can perform continuous scanning and data collection with a high speed. When performing step scanning, it can get real-time location information of the optical delay line by the delay line′ s feedback signal, and thus can complete automatic scanning rapidly. By acquiring multiple data continuously in a single step, the accuracy of acquisition in every step is improved. Results show that the system can take full advantage of the optical delay line to achieve a highest data acquisition speed of 500 kHz. When the step length is 5 mm, the time of continuous acquisition of 1000 data is only 86.34 ms, which means the system can perform automatic and rapid acquisition of terahertz time-domain pulse signal with high precision.