文章介绍了用自制双光子聚合加工系统对不同曝光时间下的外齿轮组的微加工成型性进行了研究。在photomer3015 材料内实现了外齿轮组的双光子聚合微加工, 通过扫描电镜(SEM)分析了外齿轮组的微观形貌。结果表明，随着曝光时间的增加，齿轮组成型性变得较好；曝光时间增加时，总加工时间增加。当激光功率为0.3 mW，曝光时间为10 ms 时，成功实现了齿厚为2 mm、分辨率为1.0 mm 的外齿轮组的双光子聚合微细加工。

The micro-fabrication process of the homemade two-photon polymerization fabrication system is introduced, and the formability of the external gear set is studied at different exposure time. The two-photon polymerization micro-fabrication of the outer gear sets are realized in the photomer3015, and the microstructure of the gear sets is analyzed through scanning electron microscope (SEM). The results show that with the increase of exposure time, the formability of the gear sets is better. When the exposure time increases, the total fabrication time also increase. When the laser power is 0.3 mW and the exposure time is 10 ms, the two-photon polymerization micro-fabrication of the outer gear set with the tooth thickness of 2 mm and a resolution of 1.0 mm is successfully manufactured.