强激光与粒子束, 2015, 27 (4): 041013, 网络出版: 2015-04-14
消除相位测量轮廓术中多路径效应的影响
Eliminating phase error caused by multi-path effect for phase measuring profilometry
相位测量轮廓术 多路径效应 相位误差校正 CCD成像 插值 phase measuring profilometry multi-path effect phase error correction CCD imaging interpolation
摘要
提出了一种减小多路径效应带来的误差影响的方法,优化了相位测量轮廓术,利用亮度调制的差分图确定了受多路径效应影响大的区域,并根据相邻像素点的相位进行校正。实验表明,该方法有效地减小了相位误差,提高了三维测量的精度,校正后相位误差的均方根值比校正前减小了约57.3%。
Abstract
The multi-path effect can cause undesirable phase error in regions with dramatically varied albedo. This paper proposes an effective method to correct such an error. The difference map of modulation is generated to precisely detect regions affected by the multi-path effect, and the phase error in the detected regions is corrected according to neighbor phase. Experimental results demonstrate the validity of the proposed method and show a reduction by 57.3% in the root mean square of phase errors.
杨洋, 龙云飞, 吴炜, 杨晓敏, 刘凯. 消除相位测量轮廓术中多路径效应的影响[J]. 强激光与粒子束, 2015, 27(4): 041013. Yang Yang, Long Yunfei, Wu Wei, Yang Xiaomin, Liu Kai. Eliminating phase error caused by multi-path effect for phase measuring profilometry[J]. High Power Laser and Particle Beams, 2015, 27(4): 041013.