光学学报, 2015, 35 (5): 0512001, 网络出版: 2015-04-28
激光三角测量中物面反射光斑重心偏移的修正
Reflected Spot Center Offset Correction in Laser Triangulation Measurement
测量 光斑重心偏移修正 光学三维传感 激光双三角法 measurement light spot center offset correction optical three- dimensional sensing laser dualtriangulation method
摘要
在进行激光(单)三角测量时,投影光束轴线的偏摆或投影光束在物面反射率不均匀处反射光斑重心的偏移会造成物面轮廓高度的测量误差。提出了采用双三角光路修正投影光束轴线偏摆和投影反射光斑重心偏移的方法,推导了修正公式;通过对物面反射率突变处轮廓高度的测量实验,验证了修正方法及公式的正确性;对灰度条模板表面轮廓进行双三角测量,轮廓高度均方根偏差小于0.07 mm。
Abstract
During the laser (single) triangulation measurement, the measurement error of the surface profile height is caused by the deflection of projecting beam axis or the reflected spot center offset of projecting beam shining on object surface with nonuniform reflectivity. A method is introduced to amend the deflection of projecting beam axis and the reflected spot center offset of projecting beam by using dual- triangulation light path, and a modifier formula is deduced. It is proved to be right through the profile height measurement on the reflectivity mutation position of the object surface. According to dual- triangulation measurement of the grayscale stripe template profile, the root mean square deviation of the profile height is less than 0.07 mm.
周兴敏, 刘恒彪, 葛剑敏. 激光三角测量中物面反射光斑重心偏移的修正[J]. 光学学报, 2015, 35(5): 0512001. Zhou Xingmin, Liu Hengbiao, Ge Jianmin. Reflected Spot Center Offset Correction in Laser Triangulation Measurement[J]. Acta Optica Sinica, 2015, 35(5): 0512001.