为提升傅里叶变换红外光谱仪的整体性能, 基于立体角镜与平面镜组合的光学结构, 设计了一种柔性支撑机构的摆动型动镜机构.建立和分析该机构控制模型, 设计了相适应的反馈控制算法.结果表明: 该结构具有无摩擦、抗震性好等优点;光学结构能够很好地补偿动镜摆动造成的倾斜与横移误差, 保证仪器的重复性与稳定性; 通过对控制算法参量的调整, 动镜机构的扫描准确度优于98.4%.在4 cm－1的光谱分辨率条件下, 使用该动镜机构所测得的红外光谱信噪比优于80000: 1, 能够满足高准确度定量分析的要求.

Inorder to improve the performance of Fourier Transform Infrared Spectrometer, the optical structure was based on the combination of cube corner mirror and fixed plane mirror, a swing mechanism moving mirror scanning system was designed. The system transfer function was established and the characteristics of control model was analysised, a feedback algorithm was designed to fit the system. It indicates that the system was friction free and insensitive to vibration; the optical structure can compensate the tilt and shift caused by the swing of the moving mirror, ensure the repeatabilty and stability of instrument; the algorithm parameters was adjusted to improve scanning accuracy, and the precision is better than 98.4%. The SNR of spectral is better than 80000: 1 by using the system, under 4 cm－1,which can meet the requirements of high precision quantitative analysis.