针对目前环境、医疗、空间、气象、**及安全等领域对傅里叶变换红外光谱仪微小型化、轻量化及固态化的迫切需求, 提出并研究了一种以MOEMS多级微反射镜为核心器件的空间调制微型傅里叶变换红外光谱仪。在理论研究方面, 建立了空间调制微型傅里叶变换红外光谱仪的物理模型, 探究了该系统的光场分割与空间采样的光学原理; 分析了多级微反射镜的衍射效应, 提出了一种通过补边抑制衍射噪声抑制方法; 进行了多级微反射镜采样误差的分析, 并提出了基于最小二乘拟合的修正算法; 通过对光源空间相干性、准直系统像差以及入射光场均匀性的分析, 确定了光学系统的总体设计指标; 通过对多级微反射镜基片加工精度、分束器材料色散特性和膜层透射效率等的计算分析, 确定了干涉系统的设计方法与技术参数。在核心技术方面, 提出了两个多级微反射镜的3种制作方法, 分析了制作误差的来源及对系统性能的影响。通过工艺设计及实验条件探索, 分别采用电铸法、真空镀膜法以及斜面倾角叠片法制作了两个多级微反射镜。在系统设计方面, 进行了红外准直与缩束系统的光学设计, 对整体光机系统进行了建模仿真, 分析了杂散光噪声的来源。在图谱处理方面, 利用过零采样方式, 通过图像分割算法, 获取了干涉图采样序列; 通过对干涉图序列的插值、补零、延拓与卷积方法, 完成了光谱相位误差的校正; 通过离散傅里叶变换解调, 实现了由干涉图像到信号光谱的数据反演。最后研究了系统光机整体的集成组装技术, 并对原理样机进行了实验测试。本文研制的空间调制微型傅里叶变换红外光谱仪的特点在于: 取消了动镜驱动机构与采样控制机构, 具有微小型与轻量化的特点; 干涉图的采样由多级微反射镜完成, 其空间采样的方式增加了系统的稳定性与可靠性, 实时采样的特点增加了系统的快速性与有效性; 多级微反射镜阵列采用MOEMS工艺技术制作, 增加了系统的采样精度。该光谱仪系统的结构及制作方法具有自主知识产权, 并具有广阔的应用前景。

According to the urgent requirement to the microminiature, lightweight, and staticize on Fourier transform infrared spectrometer in the field of environment, medical treatment, space exploration, meteorology, military and security, a spatial modulation Fourier transform infrared spectrometer based on MOEMS micro multi-step mirrors(MMSMs) was proposed. In theory, the physical model and the optical principle of spatial modulation Fourier transform infrared spectrometer was built and researched. A method of leaving extra patches in the boundary to suppress diffraction noise was put forward, and an algorithm based on the least-squares approximation was proposed to correct sampling error. According to the analyzing on the fabrication accuracy of MMSMs, the dispersion characteristics and the transmission efficiency of the beam splitter, the design method and the technical parameters were determined. In the core technology, three different kinds of manufacture method of MMSMs were put forward. By ways of analyzing the origin of the error, the tolerance of two MMSMs was given. The two MMSMs were completed by the method of electroform, positioning of the growth multilayer film, and inclined plane method respectively. In the system design, the infrared collimation system and imaging system were designed and manufactured. According to modeling simulation of the whole machine system, the source of stray light noise was analyzed. In the interferogram processing, using zero crossing sampling model and image segmentation algorithm, the sampling sequence was obtained. By interpolation, zero filling, continuation and convolution of the interference sequence, the phase error of spectrum was corrected. After that, the spectrum was obtained from the interferogram via discrete Fourier transform. Finally, the integration and coupling technology of the system were researched. The characteristics of infrared spectrometer developed in this project were as follows: Firstly, the moving mirror driven mechanism and the sampling control mechanism were cancelled, hence, micro-miniature and lightweight were realized. Secondly, the spatial sampling mode through MMSMs increased the stability and reliability; the characteristics of real-time sampling decreased time wastage and enhanced the optical efficiency. Thirdly, the MMSMs fabricated by MOEMS technology increased the sampling precision. Therefore, the infrared spectrometer designed by us has a great application prospect.