激光与光电子学进展, 2015, 52 (5): 050002, 网络出版: 2015-05-06
用于微型拉曼光谱仪分光芯片的阵列波导光栅研究进展 下载: 963次
Research Progress on Arrayed Waveguide Grating Chip for Micro Raman Spectrometer
集成光学 拉曼光谱仪 阵列波导光栅 相位误差 宽带宽 插入损耗 integrated optics Raman spectrometer arrayed waveguide grating phase error broad bandwidth insertion loss
摘要
微型拉曼光谱仪的核心部件是分光芯片,研制出适应微型拉曼光谱仪微型化、加工精度高、成本低的新型分光芯片对于打破目前的国外技术专利封锁,获得属于我国的自主知识产权具有重要意义。将本来诞生于光通信领域的阵列波导光栅用于微型拉曼光谱仪是研究的新思路,其具有尺寸小、精度高、工艺简单、易于批量生产的优点。总结介绍了用于微型拉曼光谱仪分光芯片的阵列波导光栅在国内外的研究进展,并且作了相应的分析,提出了一定的改进方法。
Abstract
The core component of the micro Raman spectrometer is its spectroscopic chip. It has the important meaning to develope the new spectroscopic chip the micro Raman spectrometer with microminiaturization, high machining accuracy and low cost. This work can help us to break the current foreign technology patent blockade and obtain intellectual property rights of our own country. Arrayed waveguide grating is originally used in the optical communication field. It is a new thought to arrayed waveguide grating as the spectroscopic chip for the micro Raman spectrometer. Arrayed waveguide grating has the advantages of small size, high precision, simple processing, and easy to mass production. The research progress on arrayed waveguide grating chip for micro Raman spectrometer at home and abroad is described and the corresponding analysis is made. In addition, an improved method is proposed for arrayed waveguide grating used for spectroscopic chip.
许英朝, 王清娜, 林洪沂, 朱文章. 用于微型拉曼光谱仪分光芯片的阵列波导光栅研究进展[J]. 激光与光电子学进展, 2015, 52(5): 050002. Xu Yingchao, Wang Qingna, Lin Hongyi, Zhu Wenzhang. Research Progress on Arrayed Waveguide Grating Chip for Micro Raman Spectrometer[J]. Laser & Optoelectronics Progress, 2015, 52(5): 050002.