提出了一种基于激光三角法光线折射补偿对透明平板厚度测量的方法，设计了基于单激光位移传感器的透明平板厚度测量装置，并应用于准分子激光投影光刻加工透明材料时的像面校准。首先构建了激光三角法测量情形下偏折光线和透明平板位置之间的关系，分析了散射光斑因折射发生的位置偏移量与平板厚度之间的关系，以及透明平板与散射基面的间距和散射基面位置的变化对测量结果产生的影响。然后设计了基于单激光位移传感器的透明平板厚度测量装置，实验验证了散射光斑偏移量和平板厚度之间的对应关系，测得了聚甲基丙烯酸甲酯(PMMA)厚度测量的补偿系数为0.441。综合理论分析和实验验证，结果表明散射光斑偏移量与透明平板的厚度呈线性变化关系，透明平板与散射基面间距的大小对测量结果无影响，散射基面偏移量与传感器探头示数变化量相等。PMMA 平板厚度测量的平均绝对误差小于0.01 mm，平均相对误差为0.6%，能够满足准分子激光(KrF，248 nm)加工PMMA 基生物芯片的精度要求。

A novel transparent plate thickness measurement method based on laser triangulation with the light compensation is put forward, and a design of transparent plate thickness measuring device is based on single laser displacement sensor, which is applied to correct the focal plane in excimer laser micromachining of transparent material based on projection lithography. Firstly, the relationship between bending light and transparent plate location based on laser triangulation method is built, and the relationship between displacement of scattering light spot and plate thickness is analyzed. The changing rules of measuring results caused by the distance between transparent plate and scattering base plate and the position change of scattering base plate are also analyzed. Then transparent plate thickness measuring device based on single laser displacement sensor is designed. The relationship between spot migration and transparent plate thickness is tested, and compensation coefficient of polymethyl methacrylate (PMMA) thickness measured by experiments is 0.441. Based on the theoretical analysis and experimental verification, the results show that laser displacement sensor readings are linear relation with the thickness of transparent plate, and the distance between transparent plate and scattering surface has no effect on it. The average absolute error of PMMA plate thickness measurement is less than 0.01mm, and the average relative error is 0.6%, which can meet the precision requirements for processing biochip of PMMA base by the excimer laser (KrF, 248 nm) micromachining system.