光学 精密工程, 2015, 23 (4): 988, 网络出版: 2015-05-20   

线切割与真空热扩散焊组合工艺制备微模具

Laminated fabrication of micro-mold based on WEDM and thermal diffusion welding
作者单位
1 深圳大学 机电与控制工程学院 深圳市模具先进制造技术重点实验室,广东 深圳 518060
2 深圳大学 广东省高校先进光学精密制造技术重点实验室,广东 深圳 518060
摘要
采用线切割和真空压力热扩散焊组合工艺制备了高深宽比的三维微结构。分别研究了线切割与热扩散焊工艺并获得了较好的工艺参数用于制备微模具。首先,在脉冲宽度为10 μs,脉冲间隔为40 μs,线切割电流为0.28 A,电压为60 V的条件下,对100 μm厚的铜箔进行线切割,获得了多层二维微结构。然后,在热扩散温度为850 ℃,热扩散时间为10 h,压力为1.0 μPa的工艺参数作用下,对多层铜箔二维微结构进行真空压力热扩散焊接,通过多层二维微结构的叠加形成微模具,并制备了六棱台微型腔模具及微型级联齿轮模具。实验结果表明: 三维微模具表面形貌较好,制作结果较理想,与设计模型基本相符。最后,通过超声模压成型分别获得了二阶和三阶的塑料级联齿轮。 这些微塑件质量良好, 验证了该工艺方法的可行性。
Abstract
A 3D micro-structure with a high aspect ratio was fabricated by combining Wire Electrical Discharge Machining(WEDM) and vacuum pressure thermal diffusion welding. The WEDM and thermal diffusion welding were researched, and the better technological parameters were obtained to fabricate a micro-mold. Firstly, a copper foil with a thickness of 100 μm was cut to obtain a multi-layer 2D micro-structure under the conditions of a pulse width of 10 μs, a pulse interval of 40 μs, a wire cutting current of 0.28 A and a voltage of 60 V. Then, the 2D micro-structure of a multilayer copper foil was fabricated by vacuum pressure thermal diffusion welding under the technological parameters in a thermal diffusion temperature of 850°C, a thermal diffusion time of 10 h and a pressure of 1.0 μPa. The multilayer copper 2D microstructure was connected together by vacuum pressure thermal diffusion welding to fit into a six frustum pyramid mold and gear molds with two-stage steps and three-stage steps,respectively. Experimental results indicate that the 3D micro-mold with good surface quality is an ideal fabrication and fits to design models. Finally, based on ultrasonic powder molding, two-stage and three-stage plastic gears are respectively obtained. These micro plastic parts show good quality, which verifies the feasibility and usability of laminated micro molds.

钟金明, 伍晓宇, 徐斌, 罗烽, 李积彬, 阮双琛. 线切割与真空热扩散焊组合工艺制备微模具[J]. 光学 精密工程, 2015, 23(4): 988. ZHONG Jin-ming, WU Xiao-yu, XU Bin, LUO Feng, LI Ji-bin, RUAN Shuang-chen. Laminated fabrication of micro-mold based on WEDM and thermal diffusion welding[J]. Optics and Precision Engineering, 2015, 23(4): 988.

本文已被 2 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!