采用脉冲激光沉积法制备了VO2薄膜, 应用X射线衍射和X射线光电子能谱分析表明样品为多晶薄膜。采用泵浦-探针方法研究了二氧化钒薄膜的相变特性, 实验结果表明当激光重复频率为160 Hz时, 样品最小相变响应为12 ns, 相变恢复时间与激光能量按照自然指数关系变化。仿真结果表明当激光能量一定时, 二氧化钒薄膜相变恢复时间与衬底材料的热导率、热扩散系数有关。

Vanadium oxide (VO2) thin films were successfully deposited using pulsed laser deposition (PLD) method. The samples were identified as polycrystalline thin films by analysis of X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS) . Phase transition properties of VO2 films irradiated by nanosecond laser were investigated by pump-probe technique. The results show that the minimum response time is 12 ns at repetition rate of 160 Hz. Moreover, the recovery time of phase transition varies with laser energy according to natural exponential law. Our simulation results suggest that the recovery time of phase transition correlates with thermal conductivity and thermal diffusion coefficient of substrates for the same laser energy.