为掌握高功率脉冲激光防护中脉冲激光各参量对VO2薄膜温升的具体影响, 采用有限元分析程序ANSYS的热分析模块分析了VO2薄膜在脉冲激光辐照下的温度场变化, 分析讨论了CO2脉冲激光的光斑尺寸、功率密度、脉冲宽度、重复频率四个参量, 对VO2薄膜达到相变温度的时间与相变区域尺寸的影响.结果表明, 光斑尺寸等四个参量共同影响薄膜达到相变温度的时间, 在一定范围内增大光斑尺寸和功率密度可缩短薄膜相变的时间, 而薄膜相变区域尺寸所占光斑面积的比例与二者并无直接关系, 增大脉宽或重频都有利于缩短薄膜达到相变的时间, 但前者对单脉冲产生热量的提升比后者效果更明显.

In order to know the influence of parameter of pulse laser on the temperature filed in the researches of protection to high power pulse laser, the change of temperature filed of the films was analyzed by thermal analysis module of ANSYS. The influence of laser facula radius, power density, pulse width and repetition frequency on the time and area size of the VO2 thin films phase transition was analyzed in the module. The results of analysis show that, the four parameters effect the transition reaching time of thin films together. The time can be shortened by amplifying laser facula radius and power density, but the proportion of area radius to laser facula radius can’t be effected directly. Amplifying pulse width or repetition frequency can shorten the transition reaching time, while the former is better to amplifying the heat production by one pulse than the latter.