激光与光电子学进展, 2015, 52 (6): 061402, 网络出版: 2015-06-03
高填充因子半导体激光器慢轴光束准直技术研究
Collimation of High Fill Factor Diode Laser Slow Axis Beam
激光光学 半导体激光器堆栈 慢轴准直 柱透镜 剩余发散角 laser optics diode laser stack slow axis collimation cylindrical lens remaining divergence angle
摘要
为了实现基于微透镜阵列的高功率半导体激光器堆栈光束整形,对带有快轴准直透镜的高填充因子半导体激光器堆栈慢轴光束准直技术进行了研究。对于发光单元尺寸100 μm、周期200 μm的半导体激光器,分析了填充因子对慢轴光束准直的影响,发现采用微柱透镜与慢轴方向各个发光单元一一对应的方式难以取得较好的准直效果,且会导致其快轴方向没有足够的准直空间。为了去除填充因子的限制,将实际使用的填充因子为0.5 的高功率半导体激光器堆栈以bar 条为单元进行慢轴方向光束准直设计,利用Zemax 光学设计软件进行了模拟仿真,并采用基于空间扫描法的发散角测试装置对慢轴准直后剩余发散角进行测试,实现准直后剩余发散角半角2.12°,实验表明这种准直方法非常有效。该方法简单易行,对于高填充因子半导体激光器慢轴光束准直有较好的借鉴意义。
Abstract
In order to realize the beam shaping of high-power diode laser stack by microlens array, the technique of high fill factor diode laser stack slow axis direction beam collimation is researched. The diode laser stack is accompanied with micro-cylindrical-lens of fast axis collimated. The influence of the fill factors in the slow axis direction on collimating space is analyzed. For the diode lasers with the luminescence unit size of 100 μm and the period size of 200 μm, it is difficult to collimate the slow axis direction beam by the use of micro-cylindrical-lens array, besides, there is not enough space for the fast axis beam collimation. In order to remove the influence of fill factor, bar is acted as the collimating unit in the slow axis direction for the high-power diode laser stack with the fill factor of 0.5, and simulation is carried out by the optical design software Zemax. The remaining divergence angle of slow axis direction beam after collimating is tested based on space scanning and achieve the half of the remaining divergence angle of 2.12°. The experimental results show that the collimating way of diode laser slow axis direction beam is effective. The beam collimating way proposed is simple and easy, so it is useful for high fill factor diode laser stack slow axis beam collimation.
汪岳峰, 雷呈强, 殷智勇, 尹韶云, 孙秀辉. 高填充因子半导体激光器慢轴光束准直技术研究[J]. 激光与光电子学进展, 2015, 52(6): 061402. Wang Yuefeng, Lei Chengqiang, Yin Zhiyong, Yin Shaoyun, Sun Xiuhui. Collimation of High Fill Factor Diode Laser Slow Axis Beam[J]. Laser & Optoelectronics Progress, 2015, 52(6): 061402.