设计了一种可调微流控光学变焦透镜,采用液压控制,主要结构包括微流道和微流体腔,由聚二甲基硅氧烷(PDMS)材料结合软光刻工艺制成.利用COMSOL仿真软件展示了不同液压下微流体腔变形形成的双凸透镜和双凹透镜.利用ZEMAX进行光学仿真,得到各种透镜的焦距及光路图.提出了一种校正双凸透镜球差的方法.

A new kind of optofluidic varifocal lens driven by hydraulic pressure drop was put forward in this paper.The whole microfluidic device consisting of micro-channels and micro-cavities was made of polydimethylsiloxane (PDMS) material and produced by soft lithography.COMSOL simulation showed the deformations of micro-cavity under different hydraulic pressure drops,forming convex lens and concave lens.The focal lengths and light path diagrams of all sorts of lens were obtained by using the ZEMAX optical simulation software.In the end,an effective method to correct spherical aberration of convex lens was proposed.