基于MEMS工艺的电热致动器具有与集成电路兼容的驱动电压、大的致动位移和致动力,比静电致动器、压电致动器和磁致动器有更大的优势,是现阶段致动方式的研究热点.高精度、高可靠度、可控和稳定性好的电热致动器是未来研究的新方向.针对MEMS微加工工艺制作的固体材料电热致动器,综述了电热致动器的结构形式、典型应用、模型建立以及测试方法的研究现状和主要研究成果.对电热致动器的结构设计、建模分析和测试技术方面的关键技术和存在的主要问题进行了分析和展望,以期为基于MEMS工艺的电热致动器的设计、分析和测试提供借鉴和参考.

Owing to the characteristics of high displacement,actualling force and can be operated at the voltage level which is compatible with integrated circuit (IC),electrothermal actuators (ETA) based on micro electro mechanical systems (MEMS) components are preferred to other types of actuation mechanisms such as electrostatic,piezoelectric and magnetic actuation.ETAs with outstanding characteristics of high precision,high reliability,controllability and high stability are the new future research direction.In this paper,the research status and main research achievements including the structure design,typical application,theoretical modeling and test method of ETA are systematically summarized.The results demonstrate the limitations of existing ETA and key challenges in structure design,modeling,and performance characterization,which can provide reference for the design,analysis and test of ETA based on MEMS process.