微空心阴极放电是一种典型的非平衡高压微放电,可以在较低的放电电压下产生高浓度的稠密等离子体,研究潜力巨大.分析比较了目前主要的仿真模型:蒙特卡罗模型、流体模型、动力学模型(以粒子-蒙特卡罗模型为主)、混合模型和等效电路模型.这些模型均可以用于探索放电系统内部的发展规律:微空心阴极放电经历反常辉光放电、自脉冲和正常辉光放电三个阶段,最终达到放电稳态.其中自脉冲阶段等离子体密度达到峰值,是当前研究的热点.

Micro-hollow cathode discharge is one kind of typical non-equilibrium high pressure micro-discharges.It can produce a dense plasma under a low voltage,which leads to an enormous research potential.In this paper,main simulation models are analyzed and compared,inculding Monte-Carlo model,fluid model,kinetic model (represented by particle-in-cell/Monte-Carlo model),mixed model and equivalent circuit model.The models can be used to explore the development of a discharge system.Micro-hollow cathode discharges should go through three different phases including abnormal glow discharge,self-pulsing and normal glow discharge,and finally reach a steady state.In particular,the self-pulsing phase in which the plasma density reaches a peak value is the current research focus.