光电工程, 2015, 42 (6): 50, 网络出版: 2015-07-10
光刻投影物镜中X-Y向柔性调节机构设计
Designing for Flexure-based X-Y Adjusting Mechanism of Lithograph Projection Objective
光刻投影物镜 X-Y向柔性调节机构 减速机构 柔性铰链 lithograph projection objective flexure-based X-Y adjusting mechanism deceleration mechanism flexible hinge
摘要
X-Y向柔性调节机构应用于光刻投影物镜中光学元件 X-Y方向偏心位置补偿。基于柔性铰链, 设计柔性二级减速机构, 并将之应用到新型的一体式 X-Y向柔性调节机构上。在对机构原理进行分析的基础上, 对 X-Y向柔性调节机构结构参数进行了优化设计。进一步, 运用有限元分析法, 分析了该 X-Y向柔性调节机构的性能。分析结果表明, 该机构调节行程大于 ±20 μm, 机构位移输入.输出关系稳定, 传动比约 11.9, 理论调节精度约 8.4 nm, 机构单方向驱动刚度为 0.473 μm/N; 机构开环单轴运动时, 耦合误差与主运动比值为 7.1%; 机构 1阶模态频率大于 200 Hz。该 X-Y向柔性调节机构能够应用到光刻投影物镜中。
Abstract
The flexure-based X-Y adjusting mechanism is applied in lithograph projection objectives to compensate the eccentric position of the optical elements in X-Y direction. Based on flexible hinges, two-stage flexible deceleration mechanism is designed. Further, making use of the two-stage flexible deceleration mechanism, a flexure-based X-Y adjusting mechanism which is new and of one part is created. Based on the analysis of the principle of the mechanism, structural parameters of the flexure-based X-Y adjusting mechanism are optimized. Moreover, using finite element method, performance of the flexure-based X-Y adjusting mechanism is studied. The results showed that the adjusting stroke is greater than ±20 μm, the displacement input-output relationship of the mechanism is steady, the transmission ratio is 11.9, the theoretically regulation accuracy is about 8.4 nm, the single-direction drive stiffness is 0.473 μm/N, and the ratio of coupling error and the main movement is 7.1%, when the mechanism moves open-loop and single-axis, and the first modal frequency is greater than 200 Hz. The flexure-based X-Y adjusting mechanism can be used in lithograph projection objective.
陈华男, 郭抗, 张玲花, 刘健, 尚红波. 光刻投影物镜中X-Y向柔性调节机构设计[J]. 光电工程, 2015, 42(6): 50. CHEN Huanan, GUO Kang, ZHANG Linghua, LIU Jian, SHANG Hongbo. Designing for Flexure-based X-Y Adjusting Mechanism of Lithograph Projection Objective[J]. Opto-Electronic Engineering, 2015, 42(6): 50.