变形镜作为自适应光学系统的核心器件，波前拟合能力是其主要性能参数。设计了三角形、正方形、环形3种驱动器排布方案，采用Ansys建模提取了驱动器影响函数。对比仿真分析了设计方案对低阶基元像差及其1000帧组合像差的拟合能力。结果表明：环形排布为非接触、力驱动器的最佳排布方案，对组合像差的拟合残差均方根值平均值为0.016 μm；环形排布变形镜对离焦和像散峰谷值分别大于30 μm和15 μm时均有很好的拟合能力。分析了单驱动器失效对变形镜波前拟合能力的影响，结果表明，驱动器失效对音圈电机变形镜拟合能力影响甚小，拟合残差均方根值变化小于0.01 μm。

Deformable mirrors is the key element for adaptive optics system, and wave-front fitting capability is the main parameter. The Ansys software is used to calculate the actuator′s influence function. Fitting capability is compared, which is based on the three arrangement schemes (diamond arrangement, square arrangement, annular arrangement) fitting low order primitive aberrations and 1000 frames combination of Zernike aberration. Simulation results show that annular arrangement is the best actuator arrangement schemes of contactless force actuator deformable mirror, and the average root-mean-square value of fitting combination aberration is 0.016 μm； annular arrangement deformable mirror also has a good fitting capability to the defocus and astigmatism when its peak valley value is larger than 30 μm and 15 μm. The influence of a broken actuator on the deformable mirror fitting capability is analyzed. Results show that it has little influence on the deformable mirror fitting capability, its root-mean-square value increment is below 0.01 μm.